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Combined experimental and DFT analysis of initial adsorption behavior in HfZrO2 thin films on TiN surface

작성자 인하대 날짜 2026-07-30 10:52:08

Combined experimental and DFT analysis of initial adsorption behavior in HfZrO2 thin films on TiN surface, 2025, Elsevier B.V., http://doi.org/10.1016/j.matlet.2025.139581