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In2O3/TiN bi-layer electrode for ZrO2-based metal-insulator-metal capacitor

작성자 인하대 날짜 2025-11-05 17:30:11

In2O3/TiN bi-layer electrode for ZrO2-based metal-insulator-metal capacitor, 2025, ELSEVIER, https://doi.org/10.1016/j.apsusc.2025.164149