Effects of Deposition Power and Thermal Treatment on Ferroelectric Properties of Sputtered Hf₀.₅Zr₀.₅O₂
작성자 관리자
날짜 2025-01-03 14:23:35
Effects of Deposition Power and Thermal Treatment on Ferroelectric Properties of Sputtered Hf₀.₅Zr₀.₅O₂, 2024, IEEE TRANSACTIONS ON ELECTRON DEVICES, 10.1109/TED.2024.3381103
