Low-Temperature Fabrication of High Quality Gate Insulator in Metal-Oxide-Semiconductor Capacitor Using Laser Annealing
작성자 관리자
날짜 2022-11-18 17:04:06
Low-Temperature Fabrication of High Quality Gate Insulator in Metal-Oxide-Semiconductor Capacitor Using Laser Annealing, IEE electron device letters, 2019, https://ieeexplore.ieee.org/abstract/document/8606421
