Highly anisotropic etching of molybdenum thin films using Cl2/O2/HBr/Ar gas mixtures
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날짜 2026-09-30 16:52:36
Highly anisotropic etching of molybdenum thin films using Cl2/O2/HBr/Ar gas mixtures, 2026, Elsevier BV, https://doi.org/10.1016/j.mssp.2026.110997
